Experimental Calibration and Error Identification of Micro ElectroMechanical Systems

Rapid growth in development of Micro Electro-Mechanical Sensors (MEMS) as well as wide utilization of advanced estimation algorithms have increased application of MEMS in various fields. However, MEMS-based navigation is not efficient without an appropriate sensor calibration due to large amount of MEMS errors. Therefore, error identification and sensor calibration of micro electro-mechanical inertial sensors of gyroscopes and accelerometers have been investigated in the present paper. In this regard, Allan variance as a simple and understandable method has been adopted to identify stochastic errors of the inertial sensors. Then, all error parameters including scale factors, biases, and misalignments have been determined utilizing weighted least square method. Finally, the presentation of error sphere has shown the performance and viability of the inertial MEMS calibration process.