Manipulation dynamic modeling for micro/nano-devices manufacturing using the LuGre friction model

Nanomanipulation process using atomic force microscopy is one of the new methods in manufacturing. This process has been seriously considered by researchers. Due to very high precision in the manufacture of devices for micro/nano-exist, accurate modeling process will have a significant impact on the construction of the devices. Also, due to the high cost of using atomic force microscopy manufacturing micro/nano-devices, it is necessary to first model this process was carefully done and then enters the construction areas. So far, many researchers have focused on modeling manipulation, most of their research, in conjunction with the 2D manipulation and been made using simple models of friction. Since the real manipulation in micro/nano-devices manufacturing is done in 3D environment and also given that the transition from the macro to the micro/nano, surface forces such as friction are important, therefore, in this paper, for the first time, LuGre friction model, in 3D manipulation modeling has been used. The results, indicating a decrease critical force and time manipulation using LuGre friction model versus the simple models, this is due to the fact that the LuGre friction model contained actual contact area, while other models involve nominal contact surface. Also, compare the 3D results obtained by 2D results show an increase in critical force and time that was due to the increase in surface area is proof of the accuracy of modeling.