Determination of Optical Properties in Germanium Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition

In this research, Germanium-carbon coatings were deposited on ZnS substrates by plasma enhanced chemical vapor deposition (PECVD) using GeH4 and CH4 precursors. Optical parameters of the Ge1-xCx coating such as refractive index, Absorption coefficient, extinction coefficient and band gap were measured by the Swanepoel method based on the transmittance spectrum. The results showed that the refractive index of the Ge1−xCx coatings at the band of 2 to 2.2 µm decreased from 3.767 to 3.715 and the optical gap increased from 0.66 to 0.72 eV as CH4:GeH4 increases from 10:1 to 20:1.