Production of TiO2-SnO2 nano structural thin films prepared by electron beam and sol-gel methods as ethanol sensor

Nanostructured TiO2-SnO2 thin-film ethanol sensors have been fabricated on glass substrates using electron beam and sol-gel methods. The surface structure, morphology and optical transmission characteristics of the films were analyzed by X ray diffraction, scanning electron microscopy and UV/VIS/NIR spectrometry. The TiO2-SnO2 films were less than 300 nm thick and consisted of nanocrystallines about 20 nm and 33nm for electron beam and sol-gel methods respectively. The sensing characteristics of TiO2-SnO2 nano structure thin film in electron beam and sol-gel methods, in the flow rate of ethanol at 1800, 2000 and 2400 cc/min at the operating temperature of 200˚C were measured