Design and Simulatuion of a Hybrid Nano Piezoelectric Resistive-Capacitive Accelerometer Sensor

In this paper, design and mathematical simulation of a hybrid piezoelectric capacitive-resistive nano accelerometer sensor has been investigated using Comsol multiphysics finite element software. The governing equation of motion in the transverse direction for a cantilever Euler-Bernoulli beam has been used considering electrostatic and van der Waals-Casimir forces. The effect of existence of piezoelectric layer, piezoresistive and capacitive patches in the bending behavior of the sensor is considered applying the physical properties of piezopatches and then simulated and solved using mathematical modules of the Comsol software. The obtained results are included the values of ∆R/R, ∆V/V and ∆C/C for piezo patches with respect to the variation of applied acceleration of the sensor, stress distribution along the length of the beam and maximum value of von Mises stress to compare with the yield stress of the sensor, deflction of the beam with respect to the variation of applied acceleration of the sensor, fatigue analysis for the sensor and the sensor’s mode shapes and natural frequencies to determine the performance of the sensor. The effects of changes of different values including nano g acceleration and material properties of piezoresistive patch on the behavior of the sensor are also considered in the analyses. It can be observed that nansensor has been satisfctory well designed from measuring sensitivity, stress level and fatigue life point of views.