Fabrication of Tin Oxide Gas-Sensor by Sol Gel Method and Rotary Deposition Technique

In this paper, fabrication steps of a gas sensor based on the Sol-Gel method and spin-coating technique is reported for smoke detection. A system called" Spinner" at temperature 400C is employed to deposit a thinner sensitive sensor. To fabricate a thin layer of "Tin Oxide", lean Decoloured is deposited, and glass as the base substrate is used. A process called “spin Coating “several times are tried on the “Spinner “to find an optimal speed of fabrication. The thickness of layers depends on the speed of spinner, consequently different thicknesses of layers according to different types of the spinner speed can be fabricated. After the production of varied sensors, the electrical resistance and sensitivity graphs according to the spinner speed is presented in the response of different temperatures for gas. Our research after analyzing the obtained data and comparing them together indicate that, the suitable sensitivity of the samples can be achieved by the Sol-Gel technique.