Sobol Method Application in Sensitivity Analysis of LuGre Friction Model ‎during 2D Manipulation ‎

Simulation of manipulation is a basic tool for accurate and controllable displacement of bodies and particles at micro and nano scale. The atomic force microscope (AFM) system has become a useful tool for direct measurements of micro and nano structural parameters and unraveling the intermolecular forces at nanoscale level with atomic-resolution characterization. Friction forces are one of the parts of surface properties which play an important role in manipulation of nanoparticles. In order to gain more precise manipulation, different friction models have been developed one of which is LuGre model. In this paper sensitivity of manipulation of nanoparticle has been analyzed to dimensional and environmental parameters based on LuGre friction model using Sobol method. In previous work sensitivity analysis has been performed using graphical sensitivity analysis; hence the importance percentages of parameters are not clear but Sobol method, which is a statistical model, solves this problem. Results show that cantilever thickness is the most effective dimensional parameter on critical force value while cantilever length and width are less important. Environmental parameters such as cantilever elasticity modulus, substrate velocity and adhesion, respectively, take next orders.