Design and Fabrication of aLaser Lithography System Using Blu-Ray Optical Head

In this paper, we present a successful implementation of a cost-effective direct laser lithography system, using a Blu-Ray optical head. In general, laser lithography systems can be divided into two parts, an optical system and a motion stage. In this work, optical system is provided by a Blue-Ray assembly, containing a 405 nm semiconductor diode laser and 0.85 NA objective lens. The laser beam along the surface of substrate is kept on focus point by an autofocus subsystem, implemented by the laser of optical head and fabricated electronic boards.Motion stage is a three axis nano-positioner which is synchronous with optical head. Experimental results show that the resolution of the lithography system is about 3 μm. However, because of good parameters of Blu-Ray optical head a smallest feature size of about 500 nm can be obtained.