Development of Li-doped cubic P mesoporous silica MCM-48 as a novel humidity sensor

LiCl-doped mesoporous silica MCM-48 with cubic mesostructure, using a di erent doping concentration of LiCl, has been prepared. The LiCl-MCM-48 type materials were characterized employing XRD, FT-IR, SEM, and nitrogen adsorptiondesorption isotherm. We had the humidity sensors on a ceramic substrate with two Ag-Pd interdigital electrodes with ve ngers. The sample with 15 wt% LiCl-doped MCM-48 shows an excellent linearity in the whole humidity range of 11%-97%. It has very good response and recovery time, about 22 and 30 sec, respectively.