Nonlinear feedback controller of electrostatically actuated clamped-clamped microresonator with T-shaped plate

In this study, control design of a T shaped mass connected to the clamped-clamped microbeam excited by electrostatic actuation is investigated. The actuation force is generated by applying an electric voltage between the horizontal part of T shaped mass and an opposite electrode plate. In this model, the micro-beam is modeled by Euler-Bernoulli theory as a continuous beam. The T-shaped assembly connected to the the microbeam is assumed as a rigid body and nonlinear effect of electrostatic force is considered. Equations of motion and associated boundary condition are derived using the Lagrange’s principle. The differential equation of nonlinear vibration around the static position is discretized using Galerkin method.. The discretized equations are solved by the perturbation theory. To improve the dynamics behavior of systems, nonlinear control feedback has been presented. The controller regulates the pass band of microcantilever and analytically approximate the nonlinear resonance frequency and amplitudes of the periodic solutions when the microcantilever is subjected to one point and fully distributed feedback forces. The results of paper may be used for improving the design of mass sensors based on nonlinear jump phenomena.