Static and Dynamic Pull-in Instabilities Analysis of Partially Affected Clamped Nano Actuators: The Substrate Effect
Author(s):
Article Type:
Research/Original Article (دارای رتبه معتبر)
Abstract:
Many researches have been carried out for modeling of micro/nano electromechanical systems instabilities, in which both movable and substrate electrodes are at the same size; however, there is no research considering the static and dynamic pull-in instabilities of micro/nano actuators with a smaller substrate electrode in the presence of small size effects. In the present study, the static and dynamic behaviors of partially affected clamped micro/nano actuators are investigated and the effects of position and length of the substrate electrode are analyzed. The non-linear Euler-Bernoulli governing equation of the beam motion and the corresponding boundary conditions are derived using the Modified couple stress theory. Finite element method is utilized to solve the governing equations. In order to investigate the accuracy of the utilized finite element method, the obtained results are compared with those available in the literature and a good agreement between them was found. The results demonstrate that a decrease of the substrate electrode length leads to an increase of the required pull-in voltage and the pull-in capillary force. Moreover, a small reduction in the pull-in deflection of the nano-beam is observed because of the decrease of the substrate electrode. Finally, a new parameter, named as balanced size effect-capillary force which changes the trend of the behavior of the nano-beam, is introduced.
Keywords:
Language:
Persian
Published:
Amirkabir Journal Mechanical Engineering, Volume:50 Issue: 5, 2018
Pages:
1023 to 1038
magiran.com/p1942398
دانلود و مطالعه متن این مقاله با یکی از روشهای زیر امکان پذیر است:
اشتراک شخصی
با عضویت و پرداخت آنلاین حق اشتراک یکساله به مبلغ 1,390,000ريال میتوانید 70 عنوان مطلب دانلود کنید!
اشتراک سازمانی
به کتابخانه دانشگاه یا محل کار خود پیشنهاد کنید تا اشتراک سازمانی این پایگاه را برای دسترسی نامحدود همه کاربران به متن مطالب تهیه نمایند!
توجه!
- حق عضویت دریافتی صرف حمایت از نشریات عضو و نگهداری، تکمیل و توسعه مگیران میشود.
- پرداخت حق اشتراک و دانلود مقالات اجازه بازنشر آن در سایر رسانههای چاپی و دیجیتال را به کاربر نمیدهد.
In order to view content subscription is required
Personal subscription
Subscribe magiran.com for 70 € euros via PayPal and download 70 articles during a year.
Organization subscription
Please contact us to subscribe your university or library for unlimited access!