Investigation of materials in nano scale using Scanning Capacitance Microscopy

Scanning Capacitance Microscope (SCM) is kinde of scanning probe microscope in which a thin electrode probe scan across the sample surface. In this way, the sample surface is characterized by data obtained from changing electrostatic capacitance between surface and probe. Scanning Capacitance Microscopy is non-destructive method and used to characterize and describe the semiconductors. One of the commercial applications of SCM is imaging the dopant in semiconductors. This microscope can also be used to to measure charge carrier density in nano-meter scale. The ability of SCM to image charge distribution with high resolution and sensivity cause that this is known as a valuable method to identify nano-materials.