Synthesis and structural properties of silicon nanoparticles derived from nanoparticles in a vapor-liquid-solid VLS mechanism

In the present research, nanoparticles and silicon nanoparticles were synthesized using gold catalyst by chemical vapor deposition methods and liquid-solid vapor VLS techniques at different times. The Nano structural properties of the synthesized samples were investigated using experimental techniques of scanning electron microscopy SEM, transmission electron microscopy TEM and X-ray diffraction XRD. The results of SEM images showed nanoparticles with spherical morphology with diameters in the range of 60 to 180 nm and nanoparticles with needle morphology. XRD analysis confirmed the presence of crystalline phase silicon peaks in the synthesized sample. The results of TEM and Raman show the inner structure of the samples at 10 and 20 nm scales as crystalline core-shell, respectively.