Design and Nonlinear Analysis of a Novel MEMS-Based Resonator for Biomedical Applications

Complementary metal oxide semiconductor (CMOS) based microelectromechanical systems (MEMS) resonators are the main component of modern integrated systems that are designed and fabricated using CMOS composite layers. The design of these resonators, which are actuated electrostatically, is strongly dependent on the ambient temperature and the used materials. Important factors, such as structural features, actuator type, and the used materials should be considered in the design of micro resonators because they strongly affect the quality factor, power consumption and operating frequency of these devices. However, in designing micro resonators, electrostatic actuators are preferred over other actuator types due to their lower manufacturing cost, lower losses, and higher controllability. In this paper, first, some micro resonators are designed and their structures are then investigated. The micro resonators are mechanically analyzed to optimize their dimensions. A bias voltage of 0.1 V is applied to the micro resonators to investigate their feasibility for implantable biomedical applications. The switching time for a Zinc (Zn) movable plate is equal to 0.5 µs. In this paper, the role of device dimensions, Young’s modulus, switching time, material type, bridge displacement, and voltage (which is an important challenge in electrostatic resonators since it is usually high), as well as the effects of temperature on displacement are investigated.